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FerroDrive
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FerroDrive motorized spindles from Ferrotec combine a hermetic
Ferrofluidic® vacuum feedthrough with a high
precision motor and controller to offer a compact and high
performance integrated sealing and rotation system. Supplied
ready to install, a FerroDrive saves you time and effort in
choosing and integrating components.
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 FerroDrives
are offered with hollow or solid shafts in sizes up to 2"
(50mm). Two different versions are available - a basic motorized
spindle which uses a standard controller and Hall effect sensors
for simple velocity control (within 2%), and a high precision
version which features an encoder and advanced digital controller
for extremely accurate speed and position control (within
0.01% or better).
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Applications
- Thin film
- Optical coating
- Ion beam deposition
- Ion beam etch
- PVD
- Sputtering
- Ion implantation
UP to Ø 1"
UP to Ø 2"
Products, Performance and Specifications
This data represents the performance of the complete
FerroDrive (motor, feed-through and drive), not simply the motor
in isolation.
Customization
In addition to our standard FerroDrive products
we can offer application-specific models. These may include features
such as large diameters (up to 6"), shaft modifications, water
cooled motors and various positioning options including higher resolution
encoders and other types of positioning and control devices such
as limit switches.
Ferrofluid | Vacuum
Feedthroughs | Thermoelectric Modules
Contract Manufacturing | Literature
Rack | Specialty Seals
Inertia Dampers | Electron
Beam Evaporation
 
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Ferrofluid
