The
Ibis 1000 oxygen implanter is developed and manufactured by Ibis
Technology Corporation. The Ibis 1000 is a fully automated system
that maintains the highest levels of process consistency. The machine
can process 4, 6, and 8 wafers.
Ibis manufactures
SIMOX SOI wafers and the oxygen implanters that are used to process
SIMOX-SOI wafers. The Ibis 1000 is used by one of the worlds
leading chipmakers, which is producing wafers both for its own products
and for customer applications.
|