VCA Contact Angle Equipment and Wafer Surface Analysis System

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Plasma Systems

Contact Angle Analysis Equipment

	General purpose systems

	Semiconductor and wafer Systems

	Flat panel display systems

	Principles of Video Contact Angle Surface Analysis Presentation

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Semiconductor/Wafer System

VCA-3000S 300mm stage

VCA-3000S Wafer Surface Analysis Systems are specially design for use in semiconductor wafer processing quality control. The system provides quick and accurate contact angle/surface energy analysis on wafer surface to evaluate adhesion, cleanliness and coatings. The syringe mechanism can be raised for easy loading and unloading eliminating the possibility of wafer damage.

Although the system was designed for wafer surface analysis it is also a useful tool for any application that requires a large stage. Samples sizes up to 12"W x 12"L x .75"H can easily be accommodated by this system.

VCA-3000S 300mm stage
VCA-3000S Wafer System
300mm stage

APPLICATIONS

Coating assessment of the HMDS process
Surface contamination detection
Adhesive and primer preparation
Coating uniformity
Coating quality
Surface cleanliness

FEATURES

High-resolution video camera with magnifying lens with high intensity LED lighting for precise image capture
300mm rotating stage, allows access to all areas of the wafer
High-end PC standard with high-performance video board for advanced image analysis and video capture
Similar software package as our popular VCA Optima series
Window XP or NT Operating systems
15" TFT Flat Screen Monitor

Windows™ SOFTWARE FEATURES

Automatic contact angle imaging and calculation
Dynamic droplet capture (movie viewing of droplets)
Surface energy (dynes/cm) analysis
SPC (Statistical Process Control)
Pendant Drop surface tension analysis