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business > plasma systems and contact angle analysis equipment > plasma systems
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| System Specifications |
- Main: 115 VAC, 15amp
- RF Power: 300W, 13.56 MHz
- RF Match: Automatch
- Control: Windows based PC control
- Physical Size: 24" W x 24" L x 12" H, weight
75 lbs
- Chamber: 8" diameter, 10" depth; capacitively coupled; one gas feed
- Gas Feed: One MFC included
- Options: Vacuum Pump; oxygen service on pump; mist filter on
pump; capacitance manometer; throttle valve; 23 cfm pump (requires
3P 208 VAC); pump filtration system, 2nd MFC
- Chamber Options: Quartz, Pryex, Aluminum
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(Click
to see 3D Model) |
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| The two models are configured differently in reactor chambers and vacuum units to accommodate parts in different size and volume. PC control, advanced gas input, mixing, high-power vacuum and shelf configurations provide these systems the ability to handle various requirements in precision cleaning and surface modification. |
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| System Configuration |
| REACTOR CHAMBER |
- All-aluminum construction
- PS350 work volume: 16.75" H x 13.5" W x 20" D
- PS500 work volume: 21" H x 14.5" W x 27" D
- Primary plasma driven shelf design
- Patented power distribution (US Patent no. 4,887,005 / 5,190,703 / 5,228, 963 / 5,468 560 / 5,733,511)
- Dielectric isolation of electrodes preventing RF interaction with chamber walls
- Front-to-back laminar distributed gas flow
- 4 glass shelves (9 slots
total)
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| PROCESS CONTROL SYSTEM |
- Microprocessor controller stores an infinite number of
process recipes
- Digital displays for: PROCESS TIME, PRESSURE, GAS FLOW and RF POWER
- Automatic self-diagnostics touch screen display
- Automatic error checking of gas flow pressure, RF, forward and reflected power
- 2 gas lines with individual mass flow controllers and isolation valves
(3rd MFC optional)
- Fast and slow vent controls
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| RF GENERATOR |
- 0 - 600 watt, 13.56 MHz, solid-state generator
- Automatic impedance matching network with fast automatic tuning
- RF automatic impedance matching network
- Temperature probe (option)
- N2 backfill (option)
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| PUMP PACKAGES |
- Turnkey installation (including flexible plumbing and all fittings.)
- 50 cfm 2-stage rotary vane pump (or alternative high-capacity 180 cfm roots blower package) with integral connection to process controller
- Pump option for lubricating with inert oil
- External filtration system with pressure gauge (option)
- Oil-mist separator (option)
- Integral pump starter with control panel (on blower packages)
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