Nashua, NH, July 16, 2001
The new EV S-6 from Ferrotec is a unique and innovative electron beam
evaporator which offers unrivalled flexibility in source location. It
is different from other electron beam evaporators in that the vacuum
compatible stepper motor and water cooling are inside the evaporator
rather than outside the chamber. This means that the EV S-6 is not constrained
by a motion feedthrough and can operate in any location or height in
the chamber.
This flexibility in positioning makes it ideal for applications such
as production coatings or laboratory-scale evaporations with a variety
of different materials or with materials requiring continuous pocket
rotation. It is also ideal for system retrofits as, unlike with a traditional
evaporator, there is no need for baseplate holes to be a specific size
or in particular location.
All functions of the evaporator, including the stepper motor controller
can be controlled through the Genius controller. This offers complete
control over the entire evaporation process including hearth rotation,
evaporation parameters for each material or pocket and sweep patterns.
Evaporation parameters and sweep patterns can be stored to ensure process
and the RS232 interface enables process control via a computer. All
parameters can be controlled from the detachable hand held remote control
unit for ease of use.
The EV S-6 operates at powers up to 6kW. A variety of hearth configurations,
both directly and indirectly cooled is available. Custom designed hearths
can also be supplied. For operation at low base pressures, a UHV stepper
motor design is available. This offers reduced outgassing and can be
baked to 300°C.
A larger version for powers up to 8kW, the EV S-8 will be available
later this year.
